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Full equipment list
Fabrication and prototyping tools
The Fabrication and Prototyping Facility has many tools for development of micro- and nanostructured materials and novel device designs. Many of these tools are located in our Class 100 Clean Room.
Film deposition and growth
Sample preparation and processing
Materials and device characterization tools
The Materials and Device Characterization Facility has many tools to provide detailed structural, compositional and performance characteristics of various materials and devices.