SEM 3 - Explorer

The Explorer is a scanning electron microscope that is designed for the imaging and elemental analysis of a wide spectrum of surfaces and particulates. This system is equipped with:

• Imaging resolution of ~20 nm
• Secondary-electron detector
• Backscattered electron detector
• Variable Pressure of 0.01-1.0 Torr
• Acceleration Voltage of 0.2-25 kV
• OmegaMax EDS Detector with a resolution of 133 eV
• Stage motion up to 75 x 95 mm
• Chamber size of 170 x 220 x 50 mm (x, y, z)Tool Specs