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PVD 6
- Sputter: ZnO, Cr, ITO, Nb2O5
- Sources: 3 sputter, DC and RF
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers
Tool Specs
Tool Status | Up |
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Manufacturer | Kurt J. Lesker |
Model | PVD75 |
Typical Application | Oxide deposition |
Location | 6060.10 |
Related Documents | |
Training Contact | Chris Balicki - balicki@4dlabs.ca |
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