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PVD 6
- Sputter: ZnO, Cr, ITO, Nb2O5
- Sources: 3 sputter, DC and RF
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers
Tool Specs
Manufacturer | Kurt J. Lesker |
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Model | PVD75 |
Typical Application | Oxide deposition |
Location | 6060.10 |
Related Documents | |
Training Contact | info@4dlabs.ca |
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