PVD 8

  • Sputter: Ni
  • Sources: 3 sputter RF
  • 5E-7 Torr base pressure
  • processing for small pieces, 50 mm, 100 mm, and 150 mm wafers

Tool Specs

Manufacturer Kurt J. Lesker
Model PVD75
Typical Application Ni sputter
Location 6060.10
Training Contact info@4dlabs.ca