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PVD 8
- Sputter: Ni
- Sources: 3 sputter RF
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers
Tool Specs
Manufacturer | Kurt J. Lesker | |
---|---|---|
Model | PVD75 | |
Typical Application | Ni sputter | |
Location | 6060.10 |
|
Training Contact | info@4dlabs.ca |
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