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Mask aligner 2
- processing for small pieces, 50, 100, and 150 mm wafers
- near UV (365 nm) LED light source and optics
- automatic alignment capabilities with front and back-side alignment
- sub-micron features with vacuum contact
- configured for 125 and 175 mm masks
Tool Specs
Manufacturer | OAI | |
---|---|---|
Model | MBA 800 | |
Typical Application | Optical lithography | |
Location | 6060.11 | |
Related Documents | ||
Training Contact | info@4dlabs.ca |
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