Clean Room

The class 100 clean room houses most of our micro- and nanofabrication equipment. Particle counts in all of our 13 clean room suites are kept below 100 particles/ft³. Our clean room is designed to provide seemless mobility throughout the labs without having to leave the clean space. The temperature and humidity are regulated to 19.5 +/- 1.5 °C and 35-60% RH.