Advanced Lithography

Nanoscale fabrication

The 4D LABS electron beam lithography system gives you the ability to fabricate at the smallest possible scale. Our lithography system is capable of creating structures at sizes as low as 20 nm. We can work at substrate sizes from a few mm up to 6 inches or more.

We have several different lithography techniques available depending on resolution and scale needed. This includes:

• Electron beam lithography
• Laser lithography
• Optical lithography

Laser Cutting

The 4D LABS laser cutting system can dice samples and create shadow masks and other devices.

Photomask Fabrication

We also offer photomask fabrication services for lab users performing optical lithography.