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Plasma stripper 1
- Parallel plate design
- Resist stripping or ashing with O2 (Ar gas also available
- 450 W reactor
- Processing for substrates from small pieces to 150 mm wafers
Tool Specs
Manufacturer | Technics |
---|---|
Model | PEII-A |
Typical Application | Photoresist ashing |
Location | 6060.5 |
Related Documents | |
Training Contact | info@4dlabs.ca |
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