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Spin coaters
- Programmable spin speeds, temperatures, and ramp rates
- Edge bead removal available
- Aluminum hot plate surface for uniform heating
- Dedicated spin coaters and hot plates for PMMA and MiR 703
- Spin speeds up to 6000 rpm
- Processing for small pieces, 50, 100, and 150 mm wafers
Tool Specs
Typical Application | Thermal processing |
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Location | 6060.7 |
Related Documents | |
Training Contact | info@4dlabs.ca |
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