Plasma cleaner

The Fischione Model 1020 Plasma Cleaner is designed to clean transmission and scanning electron microscope specimens and specimen holders, in a gentle O2(25%)/Ar(75%) plasma environment.  The purposes of this cleaning are:

  • Enhance imaging and analytical results
  • Remove existing carbonaceous contamination
  • Prevent carbonaceous contamination during electron beam exposure

Within a reasonably selected cleaning time, i.e. < 60 s, the plasma cleaning should produce NO etching or sputtering of the specimen while achieving the cleaning purposes.

The Fischione Model 1020 Plasma Cleaner can be also used to obtain vacuum for the Model 9010 Vacuum Storage Container, to keep a TEM specimen holder in clean vacuum.

Tool Specs

Manufacturer Fischione Instruments
Model 1020 Plasma Cleaner
Typical Application Plasma cleaning TEM samples
Location 6120.2
Related Documents Standard Operating Procedure