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Spin-rinse-dryer
Spin-rinse and drying capability in one chamber.
- Double-stack chamber
- Each SRD chamber is operated by its own programmable controller that accepts user recipe input
- Includes resistivity monitor
- Processing for 50 and 100 mm wafer cassettes
Tool Specs
Manufacturer | Semitool |
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Model | 840S |
Typical Application | Rinsing and drying of cassette wafers |
Location | 6060.5 |
Training Contact | info@4dlabs.ca |
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