XPS, AES, ISS, SEM

• XPS: X-ray Photoelectron Spectroscopy, angle-resolved XPS, ion etching for surface cleaning and depth profiling with XPS
• XPM: X-ray Photoelectron Microscopy
• AES: Auger Electron Spectrometry
• SAM: Scanning Auger Microscopy 
• SEM: Scanning Electron Microscopy
• ISS: Ion Scattering Spectroscopy
• SIMS: Secondary Ion Mass Spectrometry
• Heating and cooling stage (-160 – 600 °C)
  

Tool Specs