Sputter system 1 - Ir/C

The Leica EM ACE600 high vacuum coating system is used for precise nanometer coating of samples for subsequent examination with an electron microscope.

• Carbon and iridium angled coating sources are configured.
  • Iridium coating is achieved using the sputtering method where argon plasma erodes a target material.
  • Carbon coating is achieved by carbon rod evaporation
• Automated stage rotation is integrated for best coating distribution.
• Integrated quartz crystal measurement accurately determines the layer thickness.
• Automated or manual height and tilt adjustment.
• Glow discharge capability uses argon plasma to makes samples & TEM grids hydrophilic.
• Any sample can be processed as long as it is not sensitive to vacuum, argon plasma or the heat generated during carbon coating.

Tool Specs