SEM 4 - Quattro

The Quattro S ESEM is a field emission Scanning Electron Microscope (SEM) with low vacuum and environ-mental SEM imaging functions, cooling and heating stages, as well as fast elemental analysis and super large area imaging capabilities. Its key features are, but not limited to:

• Schottky field emission gun assembly optimized for high-brightness/high-current, noise-free imaging; Beam current up to 200 nA;
• Continuously adjustable 0.2 to 30 kV; Lowest Landing Energy 20 V with Beam Deceleration Mode;
• Optimal high vacuum image resolution: 1.0 nm at 30 kV (SED); 3.0 nm at 1 kV (SED);
• Integrated plasma cleaner; Liquid nitrogen cold trap for improving vacuum;
• 5-axes motorized X-Y-Z-tilt-rotate stage with eucentric tilt at ~10 mm; X and Y range 110 mm, Z range 65 mm, and Tilt -15° to +90° for appropriate sample sizes; Nav-Cam photo for sample navi-gation;
• Thermo Scientific Maps function for correlative imaging work flow as well as super large area tiling and stitching.
• SED (ETD) and in-column (ICD) detectors; Retractable CLD and BSE (DBS with ABS&CBS modes) de-tectors;
• Motorized 60 mm2 UltraDry Premium EDS detector for detection sensitivity to beryllium (Be);
• ColorSEM function for instantaneous elemental identification and mapping with live SEM imaging;
• Low vacuum (LVD, 10 to 200 Pa or 0.08 to 1.50 Torr) and ESEM (GSED, 10 to 2000 Pa or 0.08 to 15 Torr) modes with <500 µm field of view;
• Cooling (-25 °C to 55 °C) and heating (high-temperature GSED, 40 °C to 1000 °C and 200 °C to 1400 °C) stages.