Mask writer

Photomasks can be fabricated with this tool.  A variety of write lenses can be utilized to write various feature sizes at an efficient rate.  The minimum resolution of the tool ~600 nm.  This tool is operated by staff only.  Instructions for ordering masks are found in the SOP section below.

Tool Specs

Manufacturer Heidelberg
Model DWL 66FS
Typical Application Photomask fabrication
Location 6060.9
Related Documents Standard Operating Procedure
Mask Writing Services
Mask Order Form
Training Contact