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SEM 2 - Nova NanoSEM
- High stability Schottky field emission gun; Fast chamber evacuation: 2 min;
- 0.2 to 30 kV; Beam deceleration with stage bias from -150 V to -4 kV; Lowest landing energy 50 V;
- Optimal high vacuum image resolution: 1.6 nm at 1 kV; 1.0 nm at 15 kV;
- High vacuum SED, in-lens (TLD), EDX, vCD (high sensitivity low kV BSE) detectors;
- Optimal low vacuum image resolution: 2.0 nm;
- Low vacuum LVD, LVD/Helix, GAD (TV-rate solid-state BSE), EDX, vCD (high sensitivity low kV BSE) detectors;
- 5-axes motorized stage; z axis movable up to 60 mm; -5°/+70° tilt
Tool Specs
Manufacturer | FEI |
---|---|
Model | Nova NanoSEM |
Location | 6120.1 |
Related Documents | Standard Operating Procedure Sample Preparation Guidelines |
Training Contact | info@4dlabs.ca |
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