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PVD 3
- Thermal: Cr
- E-beam: Ti, Au, Pt, Pd
- Sources: 1 thermal, 4 e-beam
- 5E-7 Torr base pressure
- Processing for 50mm, 100mm and 150mm wafers
Tool Specs
Manufacturer | Kurt J Lesker | |
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Model | PVD75 | |
Typical Application | Metal deposition | |
Location | 6060.8 |
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Related Documents | ||
Training Contact | info@4dlabs.ca |
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