x
close
PVD 9
- Sputter: Ag
- Sources: 2 thermal and 1 sputter
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers
Tool Specs
Manufacturer | Kurt J. Lesker |
---|---|
Model | PVD75 |
Typical Application | Silver deposition |
Related Documents | Standard Operating Procedure |
Location | 6060.10 |
Training Contact | info@4dlabs.ca |
F T