Mask aligner 1
- Sub-micron features with vacuum contact
- Interchangeable deep UV (254 nm) and near UV (365 nm) optics
- 4-camera front and back-side alignmentprocessing for small pieces, 50 and 100 mm wafers
- Configured for 75, 100, and 125 mm masks
Tool Specs
| Manufacturer | OAI |
|---|---|
| Model | MBA 800 |
| Typical Application | Optical lithography |
| Location | 6060.11 |
| Related Documents | |
| Training Contact | info@4dlabs.ca |