PVD 5

  • Thermal: Cr, Au, Al, Cu, Ag, Ni, In, Au:Ge
  • Sources: 2 thermal
  • Co-deposition capability
  • Processing for small pieces, 50 mm, and 100 mm wafers

Tool Specs

Manufacturer Custom build
Typical Application Thermal deposition
Location 6140
Related Documents

Standard Operating Procedure
Training Contact info@4dlabs.ca