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PVD 5
- Thermal: Cr, Au, Al, Cu, Ag, Ni, In, Au:Ge
- Sources: 2 thermal
- Co-deposition capability
- Processing for small pieces, 50 mm, and 100 mm wafers
Tool Specs
Manufacturer | Custom build |
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Typical Application | Thermal deposition |
Location | 6140 |
Related Documents | |
Training Contact | info@4dlabs.ca |
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