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New Quantum Fabrication Tools in 4D LABS

November 01, 2024
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4D LABS is pleased to announce the availability of 4 new tools thanks to support from PacifiCan! These are available now in NEMO, along with their SOPs.  Please contact us for more information, training and/or contract work.

Dicing Saw: A fully enclosed system capable of dicing up to 8"/200mm wafers. Features include a new vision system for wafer alignment, multiple cutting modes with a high-end water cleaning system.  

HMDS oven: Used to improve resist adhesion on wafer surfaces, capable of handling up to 8"/200mm wafers, automated recipes for HMDS deposition. 

Spin Rinse Dryer (SRD): Used for rinsing and drying wafers, primarily after RCA cleaning. It is capable of handling up to 8"/200mm wafers. 

Plasma stripper: This tool is capable of handling up to 8"/200mm wafers and features an automated recipe control.

Stay tuned - We have more systems coming in over the next few months!