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4D LABS

  • Work with us
    • Industry
    • Academic
    • Lab access
    • Fees
  • Our capabilities
    • Fabrication & prototyping
      • Clean room
      • Advanced lithography
      • Thin film deposition & growth
      • Dry etching processes
      • Wet chemistries
    • Materials & device testing
      • Electron microscopy
      • Sample preparation and processing
      • Composition analysis
      • Structural analysis
    • Equipment list
  • News & events
    • 4D LABS Seminar - Hydrogen Storage
    • Quantum of promise: how funding boost has enhanced quantum innovation at SFU
    • 4D LABS Seminar - MLA 150 Maskless Aligner
    • New Quantum Fabrication Tools in 4D LABS
    • 4D LABS Seminar - Dicing
    • 4D LABS Photo Contest
  • About
    • Staff & leadership
    • Acknowledging 4D LABS
    • Job Postings
    • Other SFU Facilities
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Dry Etching Processes

4D LABS provides etching capabilities for a variety of materials and structures, including:

  • Metals
  • Semiconductors
  • Polymers
 
We also have a deep reactive ion etcher for high aspect-ratio structures in silicon, and all systems have standard recipes for various materials.

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Our flexible operations model enables academic and industry users to solve problems at any scale.

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Burnaby, B.C.
Canada V5A 1S6

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Simon Fraser University respectfully acknowledges the xʷməθkʷəy̓əm (Musqueam), Sḵwx̱wú7mesh Úxwumixw (Squamish), səlilwətaɬ (Tsleil-Waututh), q̓íc̓əy̓ (Katzie), kʷikʷəƛ̓əm (Kwikwetlem), Qayqayt, Kwantlen, Semiahmoo and Tsawwassen peoples on whose unceded traditional territories our three campuses reside.

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  • Work with us
    • Overview
    • Industry
    • Academic
    • Lab access
    • Fees
  • Our capabilities
    • Overview
    • Fabrication & prototyping
      • Overview
      • Clean room
      • Advanced lithography
      • Thin film deposition & growth
      • Dry etching processes
      • Wet chemistries
    • Materials & device testing
      • Overview
      • Electron microscopy
      • Sample preparation and processing
      • Composition analysis
      • Structural analysis
    • Equipment list
  • News & events
    • Overview
    • 4D LABS Seminar - Hydrogen Storage
    • Quantum of promise: how funding boost has enhanced quantum innovation at SFU
    • 4D LABS Seminar - MLA 150 Maskless Aligner
    • New Quantum Fabrication Tools in 4D LABS
    • 4D LABS Seminar - Dicing
    • 4D LABS Photo Contest
  • About
    • Overview
    • Staff & leadership
    • Acknowledging 4D LABS
    • Job Postings
    • Other SFU Facilities
  • Contact us
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