Spin-rinse-dryer
- Spin-rinse and drying capability in one chamber.
- Processing for 100 mm and 150 mm wafer cassettes
- Can be operated with or without heat for drying
Tool Specs
| Manufacturer | Sitek |
|---|---|
| Model | Semitool 270-S |
| Typical Application | Rinsing and drying of cassette wafers |
| Location | 6060.5 |
| Training Contact | info@4dlabs.ca |