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Plasma stripper
- Used for descumming or stripping photoresist
- Accomodates multiple 4" wafers or a single 6" wafer, and small pieces
- Available gases are 02 and Ar. N2 is used to vent the chamber
Tool Specs
| Manufacturer | Autoglow |
|---|---|
| Model | 200 |
| Typical Application | Photoresist ashing |
| Location | 6060.5 |
| Related Documents | Standard Operating Procedure |
| Training Contact | info@4dlabs.ca |