Spin coaters
- Programmable spin speeds, temperatures, and ramp rates
- Edge bead removal available
- Aluminum hot plate surface for uniform heating
- Dedicated spin coaters and hot plates for PMMA and MiR 703
- Spin speeds up to 6000 rpm
- Processing for small pieces, 50, 100, and 150 mm wafers
Tool Specs
| Typical Application | Thermal processing |
|---|---|
| Location | 6060.7 |
| Related Documents | |
| Training Contact | info@4dlabs.ca |