Plasma stripper 1
- Parallel plate design
- Resist stripping or ashing with O2 (Ar gas also available
- 450 W reactor
- Processing for substrates from small pieces to 150 mm wafers
Tool Specs
| Manufacturer | Technics |
|---|---|
| Model | PEII-A |
| Typical Application | Photoresist ashing |
| Location | 6060.5 |
| Related Documents | |
| Training Contact | info@4dlabs.ca |