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Laser writer
- Minimum feature size of 1 µm
- Alignment accuracy of 500 nm
- 375 nm laser diode
- 50-level greyscale exposure
- Patterns up to 30 x 30 mm2
Tool Specs
Manufacturer | Heidelberg |
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Model | uPG 101 |
Typical Application | Direct laser lithography |
Location | 6060.9 |
Related Documents | |
Training Contact | info@4dlabs.ca |
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